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arXiv · 2409.05323

Preventing overfitting in infrared ellipsometry using temperature dependence: fused silica as a case study

Shenwei Yin·Jin-Woo Cho·Demeng Feng·Hongyan Mei·Tanuj Kumar·Chenghao Wan·Yeonghoon Jin·Minjeong Kim·Mikhail A. Kats
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Abstract

Fitting oscillator models to variable-angle spectroscopic ellipsometry (VASE) data can lead to non-unique, unphysical results. We demonstrate using temperature-dependent trends to prevent overfitting and ensure model physicality. As a case study, we performed mid-infrared VASE measurements on fused silica (SiO2) of various grades, from room temperature to 600 {\deg}C. We fitted oscillator models independently at each temperature, and confirmed the model's physical validity by observing the expected monotonic trends in vibrational oscillator parameters. Using this technique, we generated a highly accurate dataset for the temperature-dependent complex refractive index of fused silica for modeling mid-infrared optical components such as thermal emitters.

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Shenwei Yin, Jin-Woo Cho, Demeng Feng, Hongyan Mei, Tanuj Kumar, Chenghao Wan, Yeonghoon Jin, Minjeong Kim, Mikhail A. Kats. 2024-09-09. Preventing overfitting in infrared ellipsometry using temperature dependence: fused silica as a case study. https://arxiv.org/abs/2409.05323

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