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arXiv · 2103.15786

On-chip erbium-doped lithium niobate waveguide amplifiers

Qiang Luo·Chen Yang·Zhenzhong Hao·Ru Zhang·Dahuai Zheng·Fang Bo·Yongfa Kong·Guoquan Zhang·Jingjun Xu
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Abstract

Lithium niobate on insulator (LNOI), as an emerging and promising optical integration platform, faces shortages of on-chip active devices including lasers and amplifiers. Here, we report the fabrication on-chip erbium-doped LNOI waveguide amplifiers based on electron beam lithography and inductively coupled plasma reactive ion etching. A net internal gain of ~30 dB/cm in communication band was achieved in the fabricated waveguide amplifiers under the pump of a 974-nm continuous laser. This work develops new active devices on LNOI and will promote the development of LNOI integrated photonics.

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Qiang Luo, Chen Yang, Zhenzhong Hao, Ru Zhang, Dahuai Zheng, Fang Bo, Yongfa Kong, Guoquan Zhang, Jingjun Xu. 2021-03-29. On-chip erbium-doped lithium niobate waveguide amplifiers. https://doi.org/10.3788/col202119.060008

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