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Thermoelastic Damping in Micro- and Nano-Mechanical Systems

Ron Lifshitz·M. L. Roukes
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Abstract

The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometer- and nanometer-scale electro-mechanical systems (MEMS and NEMS). The equations of linear thermoelasticity are used to give a simple derivation for thermoelastic damping of small flexural vibrations in thin beams. It is shown that Zener's well-known approximation by a Lorentzian with a single thermal relaxation time slightly deviates from the exact expression.

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Ron Lifshitz, M. L. Roukes. 1999-09-17. Thermoelastic Damping in Micro- and Nano-Mechanical Systems. https://doi.org/10.1103/physrevb.61.5600

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