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arXiv · 2610.30579

Efficient third-harmonic generation in high-Q tantalum pentoxide microcavities

Xinke Xing·Yixuan Yang·Xinzhi Zheng·Renhong Gao·Li Deng·Jintian Lin·Ya Cheng
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Abstract

Nonlinear harmonic generation in microcavities offers a compelling route toward energy efficient on-chip short-wavelength coherent light sources, enabled by tight optical confinement within compact mode volumes and flexible dispersion engineering. Tantalum pentoxide (Ta2O5) photonic platforms are particularly promising for realizing such nonlinear processes: their broad transparency window (280-8000 nm) supports broadband operation, their large bandgap suppresses two-photon absorption, and their thick-film deposition capability enables dispersion management--features that can collectively enhance the performance of nonlinear light sources. Here, we demonstrate, to the best of our knowledge, the first efficient third-harmonic generation (THG) in high-Q Ta2O5 microcavities. These microcavities feature smooth surfaces and high loaded Q factors up to 2.67X10^6, thereby facilitating nonlinear interactions. Through dispersion engineering, efficient THG is realized in both suspended microdisks and monolithic microrings under telecom-band continuous-wave laser pumping, as confirmed by optical spectra, visible-light microscopy, and the near-cubic pump-power dependence of the conversion efficiency. This work lays a foundation for chip-scale f-3f self-referencing of frequency combs and next-generation integrated nonlinear photonics.

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Xinke Xing, Yixuan Yang, Xinzhi Zheng, Renhong Gao, Li Deng, Jintian Lin, Ya Cheng. 2026-10-22. Efficient third-harmonic generation in high-Q tantalum pentoxide microcavities. https://arxiv.org/abs/2610.30579

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