Mid-infrared-to-ultraviolet supercontinuum generation in low-loss tantalum pentoxide nanophotonic waveguides
Optical frequency combs on photonic integrated platforms are revolutionizing precision metrology, bio-imaging, atomic and molecular sensing, and ultrafast photonics, yet most remain confined to the near-infrared. This restriction prevents access to the ultraviolet, visible, and mid-infrared bands critical for a vast array of quantum, atomic, and molecular systems. The fundamental obstacle has been the lack of a nanophotonic waveguide that simultaneously provides an ultra-broad transparency window, engineered dispersion, ultra-low propagation loss, and a strong Kerr nonlinearity, all while suppressing detrimental two-photon absorption at short wavelengths. Here, we overcome this challenge by exploring tantalum pentoxide for ultra-broadband supercontinuum spanning continuously from the ultraviolet to the mid-infrared, leveraging its broad transparency window (300-8000 nm), a high nonlinear refractive index three times larger than that of silicon nitride, and a wide bandgap that suppresses two-photon absorption. Critically, by using a photolithography assisted chemo-mechanical etching process that avoids a lossy SiO2 upper cladding, we achieve dispersion engineered waveguides with record-low propagation losses of 0.066 dB/cm at telecom wavelengths and 0.43 dB/cm at 780 nm, significantly facilitating the supercontinuum spectral extension into the ultraviolet and the mid-infrared. Pumping these anomalous-dispersion waveguides with femtosecond pulses at 1550 nm yields a gap-free, 3.2-octave supercontinuum spanning from 350 to 3200 nm via a soliton-based dynamics at only 54 pJ pulse energy, representing the broadest comb spectrum on this platform. We further demonstrate a relatively flat spectrum with a -30 dB bandwidth of 1182 nm by engineering normal dispersion, validate the comb coherence via heterodyne detection, and achieve soliton-effect pulse self-compression from 126.7 fs to 19.2 fs.