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arXiv · 2610.13115

Assessing quantitative phase reliability in electron ptychography using a twisted trilayer WS2 thickness staircase

Hu Bao·Qilong Feng·Kun Ye·Tianyu Xue·Stephen J. Pennycook·Yihan Zhu·Anmin Nie·Shoucong Ning·Jing Tao
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Abstract

The phase of an electron wave is sensitive to the local electrostatic environment and can therefore provide information about atomic-scale structural variations. In electron ptychography, however, specimen thickness, multiple scattering and projected atomic overlap can complicate the quantitative interpretation of the reconstructed phase. Here, we use a twisted trilayer WS2 thickness staircase containing monolayer, bilayer and trilayer regions as an internal reference, with all regions measured under identical experimental conditions. The mean W-column phase increases by approximately 13.2% from the monolayer to the bilayer region, compared with only 4.7% from the bilayer to the trilayer region, revealing a nonlinear thickness dependence. W-S overlap has little effect on the W-column phase, whereas short-range projected W-W overlap increases it by approximately 8-9%. These results provide a benchmark for evaluating quantitative phase measurement in multilayer WS2 and for assessing phase-based mapping of local electrostatic potential, charge-density and three-dimensional atomic-scale polarization.

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Hu Bao, Qilong Feng, Kun Ye, Tianyu Xue, Stephen J. Pennycook, Yihan Zhu, Anmin Nie, Shoucong Ning, Jing Tao. 2026-10-09. Assessing quantitative phase reliability in electron ptychography using a twisted trilayer WS2 thickness staircase. https://arxiv.org/abs/2610.13115

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