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arXiv · 2602.23621

Micrometer-scale displacement and thickness sensing using a single terahertz resonant-tunneling diode

Li Yi·Shota Ito·Chao Tang·Yousuke Nishida·Koji Terumoto·Toshihisa Maeda·Yuta Inose·Masayuki Fujita
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Abstract

Resonant tunneling diodes (RTDs) support room-temperature terahertz (THz) oscillation and simultaneous THz-band detection, enabling compact monostatic THz sensors for practical and cost-effective sensing applications. In this paper, we present a highly integrated 280 GHz-band radar system based on a single RTD that exploits the self-mixing effect to generate a low-frequency interferometric signal. The resulting self-mixing signal is further analyzed from a radar perspective and processed to extract micrometer-scale displacement and thin-film thickness variations. Experimentally, the proposed system demonstrates a minimum detectable displacement of approximately 5 um and quantitatively resolves polymer film thicknesses of 12.5, 25, and 50 um.

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Li Yi, Shota Ito, Chao Tang, Yousuke Nishida, Koji Terumoto, Toshihisa Maeda, Yuta Inose, Masayuki Fujita. 2026-02-27. Micrometer-scale displacement and thickness sensing using a single terahertz resonant-tunneling diode. https://arxiv.org/abs/2602.23621

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