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arXiv · 2509.06047

A facile vector substrate platform via BaTiO3 membrane transfer enables high quality solution processed epitaxial PZT on silicon

Asraful Haque·Antony Jeyaseelan·Shubham Kumar Parate·Srinivasan Raghavan·Pavan Nukala
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Abstract

The direct integration of high-performance ferroelectric oxides with silicon remains challenging due to lattice mismatch, thermal incompatibility, and the need for high-temperature epitaxial growth. Here, a hybrid integration approach is demonstrated in which crystalline BaTiO3 (BTO) membranes are first transferred onto Pt coated Si substrates and subsequently used as vector substrates (VS) for the growth of epitaxial (001) Pb(Zr0.52Ti0.48)O3 (PZT) thin films via chemical solution deposition (CSD). A KI and HCl based etchant enables rapid and complete dissolution of the SrVO3 sacrificial layer in about 30 minutes, reducing the release time from days to minutes compared with conventional water based approaches to dissolve AVO3 and AMoO3 (A is Ca, Sr, Ba). The BTO VS imposes dominant (00l) out of plane orientation and in plane cube on cube epitaxy in the overlying PZT. Devices exhibit remnant polarization 10 to 12 micro coulomb/cm2 and coercive field of 100 kV/cm, with stable switching to 10^8 cycles on the VS. From piezoelectric butterfly loops, we extract effective d33 of 70 pm/V for PZT on VS, and 54 pm/V for PZT grown on conventional Pt Si substrates. This approach demonstrates a scalable and cost effective route for integrating functional ferroelectric materials onto silicon and offers a promising platform for future CMOS compatible oxide electronics.

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Asraful Haque, Antony Jeyaseelan, Shubham Kumar Parate, Srinivasan Raghavan, Pavan Nukala. 2025-09-07. A facile vector substrate platform via BaTiO3 membrane transfer enables high quality solution processed epitaxial PZT on silicon. https://arxiv.org/abs/2509.06047

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