arXiv · 2506.22549
50 GHz Piezoelectric Acoustic Filter
Abstract
This paper presents significant frequency scaling of acoustic filter technology to 50 GHz. This achievement is enabled by the P3F LiNbO3 multilayer stack, in which piezoelectric thin-films of alternating orientations are transferred in sequence, thereby allowing efficient exploitation of high-order modes with high quality factor (Q) and coupling coefficient (k2) in a thicker piezoelectric stack. The demonstrated filter is comprised of twelfth-order symmetric (S12) mode lateral-field-excited bulk acoustic wave resonators (XBARs), built on a 4-layer periodically poled piezoelectric (P3F) 128 Y-cut lithium niobate (LiNbO3) stack. The filter exhibits 3.3 dB insertion loss (IL) and a fractional bandwidth (FBW) of 2.9%. The miniature design, with a footprint of 0.36 mm2, makes it promising for future wireless front-end applications. These results represent the highest frequency acoustic filters reported to date, setting a new benchmark in piezoelectric filter technology. Upon further development, the platform could enable filters further into the FR2 range, essential for next-generation communication systems.
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Omar Barrera, Jack Kramer, Lezli Matto, Vakhtang Chulukhadze, Sinwoo Cho, Michael Liao, Mark S. Goorsky, Ruochen Lu. 2025-06-27. 50 GHz Piezoelectric Acoustic Filter. https://doi.org/10.1109/jmw.2026.3661341
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