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arXiv · 2408.00219

Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator

Amy Navarathna·Benjamin J. Carey·James S. Bennett·Soroush Khademi·Warwick P. Bowen
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Abstract

Whispering gallery mode (WGM) optomechanical resonators are a promising technology for the simultaneous control and measurement of optical and mechanical degrees of freedom at the nanoscale. They offer potential for use across a wide range of applications such as sensors and quantum transducers. Double-disk WGM resonators, which host strongly interacting mechanical and optical modes co-localized around their circumference, are particularly attractive due to their high optomechanical coupling. Large-scale integrated fabrication of silicon double-disk WGM resonators has not previously been demonstrated. In this work we present a process for the fabrication of double-layer silicon-on-insulator wafers, which we then use to fabricate functional optomechanical double silicon disk resonators with on-chip optical coupling. The integrated devices present an experimentally observed optical quality factors of the order of 10^5 and a single-photon optomechanical coupling of approximately 15 kHz.

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Amy Navarathna, Benjamin J. Carey, James S. Bennett, Soroush Khademi, Warwick P. Bowen. 2024-08-01. Silicon Double-Disk Optomechanical Resonators from Wafer-Scale Double-Layered Silicon-on-Insulator. https://arxiv.org/abs/2408.00219

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