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arXiv · 2309.09626

Scalable Atomic Arrays for Spin-Based Quantum Computers in Silicon

Alexander M. Jakob·Simon G. Robson·Hannes R. Firgau·Vincent Mourik·Vivien Schmitt·Danielle Holmes·Matthias Posselt·Edwin L. H. Mayes·Daniel Spemann·Andrea Morello·David N. Jamieson
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Abstract

Semiconductor spin qubits combine excellent quantum performance with the prospect of manufacturing quantum devices using industry-standard metal-oxide-semiconductor (MOS) processes. This applies also to ion-implanted donor spins, which further afford exceptional coherence times and large Hilbert space dimension in their nuclear spin. Here we demonstrate and integrate multiple strategies to manufacture scale-up donor-based quantum computers. We use $^{31}$PF$_{2}$ molecule implants to triple the placement certainty compared to $^{31}$P ions, while attaining 99.99$\,$% confidence in detecting the implant. Similar confidence is retained by implanting heavier atoms such as $^{123}$Sb and $^{209}$Bi, which represent high-dimensional qudits for quantum information processing, while Sb$_2$ molecules enable deterministic formation of closely-spaced qudits. We demonstrate the deterministic formation of regular arrays of donor atoms with 300$\,$nm spacing, using step-and-repeat implantation through a nano aperture. These methods cover the full gamut of technological requirements for the construction of donor-based quantum computers in silicon.

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Alexander M. Jakob, Simon G. Robson, Hannes R. Firgau, Vincent Mourik, Vivien Schmitt, Danielle Holmes, Matthias Posselt, Edwin L. H. Mayes, Daniel Spemann, Andrea Morello, David N. Jamieson. 2023-09-18. Scalable Atomic Arrays for Spin-Based Quantum Computers in Silicon. https://doi.org/10.1002/adma.202405006

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