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arXiv · 1805.04205

Aberration-free three dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses

Peng Wang·Wei Chu·Wenbo Li·Yuanxin Tan·Jia Qi·Yang Liao·Zhanshan Wang·Ya Cheng
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Abstract

We observe that focusing a femtosecond laser beam simultaneously chirped in time and space domains in glass can efficiently suppress the optical aberration caused by the refractive index mismatch at the interface of air and the glass sample. We then demonstrate three dimensional microprocessing in glass with a nearly invariant spatial resolution for a large range of penetration depth between 0.25 mm and 9 mm without any aberration correction.

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Peng Wang, Wei Chu, Wenbo Li, Yuanxin Tan, Jia Qi, Yang Liao, Zhanshan Wang, Ya Cheng. 2018-05-10. Aberration-free three dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses. https://doi.org/10.1364/ol.43.003485

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