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arXiv · 1611.03612

On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes

Min Wang·Yingxin Xu·Zhiwei Fang·Yang Liao·Peng Wang·Wei CHu·Lingling Qiao·Jintian Lin·Wei Fang·Ya Cheng
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Abstract

We demonstrate electro-optic tuning of an on-chip lithium niobate microresonator with integrated in-plane microelectrodes. First two metallic microelectrodes on the substrate were formed via femtosecond laser process. Then a high-Q lithium niobate microresonator located between the microelectrodes was fabricated by femtosecond laser direct writing accompanied by focused ion beam milling. Due to the efficient structure designing, high electro-optical tuning coefficient of 3.41 pm/V was observed.

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Min Wang, Yingxin Xu, Zhiwei Fang, Yang Liao, Peng Wang, Wei CHu, Lingling Qiao, Jintian Lin, Wei Fang, Ya Cheng. 2016-11-11. On-chip electro-optic tuning of a lithium niobate microresonator with integrated in-plane microelectrodes. https://doi.org/10.1364/oe.25.000124

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