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arXiv · 1609.05646

High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

Yuanxin Tan·Zhaohui Wang·Wei Chu·Yang Liao·Lingling Qiao·Ya Cheng
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Abstract

We report on fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of ~100 micron.

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Yuanxin Tan, Zhaohui Wang, Wei Chu, Yang Liao, Lingling Qiao, Ya Cheng. 2016-09-19. High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions. https://arxiv.org/abs/1609.05646

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