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arXiv · 1305.4602

Demonstration of mid-infrared waveguide photonic crystal cavities

Hongtao Lin·Lan Li·Fei Deng·Chaoying Ni·Sylvain Danto·J. David Musgraves·Kathleen Richardson·Juejun Hu
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Abstract

We have demonstrated what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared. The devices were fabricated from Ge23Sb7S70 chalcogenide glass on CaF2 substrates by combing photolithographic patterning and focus ion beam milling. The waveguide-coupled cavities were characterized using a fiber end fire coupling method at 5.2 μm wavelength, and a loaded quality factor of ~ 2,000 was measured near the critical coupling regime.

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Hongtao Lin, Lan Li, Fei Deng, Chaoying Ni, Sylvain Danto, J. David Musgraves, Kathleen Richardson, Juejun Hu. 2013-05-20. Demonstration of mid-infrared waveguide photonic crystal cavities. https://doi.org/10.1364/ol.38.002779

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