@misc{indiciaece2ae7314aa8,
  title = {Laser fabrication of vibrating microcavities on silicon: Formation dynamics and frequency tunability},
  author = {Belen Valiente and Gonzalo Gomez-Munoz and Mario Garcia-Lechuga and Irene Solana and Fernando Agulló-Rueda and David Grojo and Angel Rodriguez-Fernandez and Javier Solis and Jan Siegel},
  year = {2026},
  url = {https://arxiv.org/abs/2611.07742},
  note = {Source identifier: 2611.07742}
}