@misc{indiciae9e0668571c66, title = {Annealing-Induced Structural and Optical Evolution of Ion-Beam-Sputtered Ta2O5 Films for High-Power Laser Applications}, author = {Chang Chen and Yuan Fang and Yanzhi Wang and Jijun Feng and Yesheng Lu and Yu Chen and Ge Zhang and Jianda Shao}, year = {2026}, url = {https://arxiv.org/abs/2611.04429}, note = {Source identifier: 2611.04429} }