TY  - RPRT
TI  - Nondestructive 3D Metrology of Through-Glass Via Geometry and Internal Wall Texture Using Holotomography
AU  - Dohyeon Lee
AU  - Herve Hugonnet
AU  - YongKeun Park
PY  - 2026
UR  - https://arxiv.org/abs/2611.02225
ID  - 2611.02225
ER  -