TY - RPRT TI - Analytical framework for interpreting thermoreflectance measurements of nanoline gratings under finite spot illumination AU - Abhishek Pathak AU - Seungwon Park AU - Shubham Deshmukh AU - Alan J. H. McGaughey AU - Jonathan A. Malen PY - 2026 UR - https://arxiv.org/abs/2610.37957 ID - 2610.37957 ER -