@misc{indiciae9d009a4a77aa,
  title = {High-quality, deep formation and identification of oxygen-vacancy defects in silicon carbide},
  author = {Ryo Shiotani and Fu-Chieh Chuang and Mitsuaki Kaneko and Tetsuri Nishikawa and Hiroshi Abe and Taiga Matsuoka and Shigehito Miki and Kazuki Okajima and Takeshi Ohshima and Yoshihiko Kanemitsu and Tsunenobu Kimoto and Naoya Morioka and Norikazu Mizuochi},
  year = {2026},
  url = {https://arxiv.org/abs/2610.32642},
  note = {Source identifier: 2610.32642}
}