@misc{indiciae3958bd23936c,
  title = {Modification of optical properties in ultrathin ALD-grown NbN layers using oxygen plasma treatment},
  author = {Mustafa Teke and Nitesh Yerra and Alireza Sadeghi and Mario Ziegler and Detlef Born and Nan Du and Marco Diegel and Uwe Hübner and Sahitya V. Vegesna and Heidemarie Krüger},
  year = {2026},
  url = {https://arxiv.org/abs/2610.32553},
  note = {Source identifier: 2610.32553}
}