@misc{indiciae99d4039c1cb4,
  title = {Effect of oxygen plasma treatment on the structural and superconducting properties of atomic-layer-deposited NbN thin films},
  author = {Nitesh Yerra and Mustafa Teke and Felix Otto and Marco Diegel and Detlef Born and Uwe Hübner and Nan Du and Mario Ziegler and Sahitya Varma Vegesna and Heidemarie Krüger},
  year = {2026},
  url = {https://arxiv.org/abs/2610.32529},
  note = {Source identifier: 2610.32529}
}