@misc{indiciaea67204bdaf14,
  title = {Foundry-Fabricated Silicon Nitride Grating Arrays with Uniform Power Distribution at Visible Wavelengths},
  author = {Amged Alquliah and Xiaoxin Wang and Jifeng Liu and Anthony Rizzo},
  year = {2026},
  url = {https://arxiv.org/abs/2610.30387},
  note = {Source identifier: 2610.30387}
}