@misc{indiciaef1e142c18320,
  title = {Sidewall Metrology Protocol for Superconducting Qubit Devices},
  author = {Jørgen Garnæs and Henrik S. Guttesen and Astrid T. Rømer and Oscar Danielsson and Emily P. Duggan and Zhenhai Sun and Asen Lyubenov Georgiev and Li Wei Chang and Morten Kjaergaard and Mark Bieler and Lukas Grünhaupt and Sabbir A. Khan},
  year = {2026},
  url = {https://arxiv.org/abs/2610.26223},
  note = {Source identifier: 2610.26223}
}