TY  - RPRT
TI  - LithoWorld: An Endpoint World Model for Lithography Process-Window Recovery
AU  - Botong Zhao
AU  - Fang Yu
AU  - Xinyuan Chen
AU  - Yue Lu
PY  - 2026
UR  - https://arxiv.org/abs/2610.23408
ID  - 2610.23408
ER  -