TY  - RPRT
TI  - Direct growth of crack-free stoichiometric silicon nitride on sapphire for wide-band photonics
AU  - Zhaohui Ma
AU  - Ashish Chanana
AU  - Zhiquan Yuan
AU  - Khoi Hoang
AU  - Yiliang Bao
AU  - Daron Westly
AU  - Kartik Srinivasan
AU  - Xiyuan Lu
PY  - 2026
UR  - https://arxiv.org/abs/2610.15754
ID  - 2610.15754
ER  -