@misc{indiciaee33d5766e298, title = {Energy-dependent trapping of backscattered helium during magnetron sputtering growth: A molecular dynamics study}, author = {Pascal Brault and Anne-Lise Thomann and Alejandro Borroto}, year = {2026}, url = {https://arxiv.org/abs/2610.13509}, note = {Source identifier: 2610.13509} }