@misc{indiciaec6aaecbd04fb,
  title = {Microwave Loss in Low-Temperature ICPCVD Silicon Nitride: Dependence on Precursor Ratio and RF Substrate Bias},
  author = {H. Athreya and J. Cornelison and M. Mikhailov and R. J. H. van der Kolk and C. Chang and T. Cecil and M. N. Ali and J. A. Zebrowski},
  year = {2026},
  url = {https://arxiv.org/abs/2610.10767},
  note = {Source identifier: 2610.10767}
}