TY  - RPRT
TI  - Optimization-Based Thickness Estimation and Depth-Resolved FIB-Induced Damage Characterization via Multislice Electron Ptychography
AU  - Keun-Yeol Park
AU  - Chuqiao Shi
AU  - Murat Tuna Pamuk
AU  - Sooyoung Cheong
AU  - Seonyu Lee
AU  - Juhui Oh
AU  - Yu-Tsun Shao
AU  - Celesta S. Chang
PY  - 2026
UR  - https://arxiv.org/abs/2610.09465
ID  - 2610.09465
ER  -