@misc{indiciaefa08d163f93f,
  title = {Optimization-Based Thickness Estimation and Depth-Resolved FIB-Induced Damage Characterization via Multislice Electron Ptychography},
  author = {Keun-Yeol Park and Chuqiao Shi and Murat Tuna Pamuk and Sooyoung Cheong and Seonyu Lee and Juhui Oh and Yu-Tsun Shao and Celesta S. Chang},
  year = {2026},
  url = {https://arxiv.org/abs/2610.09465},
  note = {Source identifier: 2610.09465}
}