TY  - RPRT
TI  - Photoresist-Free Lithography via Light-Induced Redox Patterning of Oxide Thin Films
AU  - Johannes Frantti
AU  - Yukari Fujioka
AU  - Christopher Rouleau
AU  - Alexander Puretzky
AU  - Ilia Ivanov
PY  - 2026
UR  - https://arxiv.org/abs/2609.22810
ID  - 2609.22810
ER  -