@misc{indiciae6f9aaaab11f0, title = {Photoresist-Free Lithography via Light-Induced Redox Patterning of Oxide Thin Films}, author = {Johannes Frantti and Yukari Fujioka and Christopher Rouleau and Alexander Puretzky and Ilia Ivanov}, year = {2026}, url = {https://arxiv.org/abs/2609.22810}, note = {Source identifier: 2609.22810} }