@misc{indiciae4e8197dac0c9,
  title = {Topography preserved microwave plasma etching for top-down layer engineering in MoS2 and other van der Waals materials},
  author = {Abin Varghese and Chithra H. Sharma and and Madhu Thalakulam},
  year = {2016},
  doi = {10.1039/c7nr00284j},
  url = {https://arxiv.org/abs/1612.04125},
  note = {Source identifier: 1612.04125}
}