Epitaxial inversion of spontaneous polarization in ε-Ga2O3
Polar wide bandgap semiconductors offer the unique capability to manipulate internal electric fields and induce two-dimensional electron gases (2DEG). The emerging orthorhombic ε-Ga2O3 is a promising candidate owing to its large spontaneous polarization (Psp). However, exploiting this material is hindered by fundamental ambiguities surrounding its absolute Psp vectors and the inability to govern its epitaxial direction. Here we show the resolution of the absolute Psp vectors in ε-Ga2O3 and control of its macroscopic polarity via substrate engineering. By correlating interferometric piezoresponse with atomic configurations, we establish an identification criterion where opposing polarities are assigned through the geometric elevation within an asymmetric four-atom sequence. Guided by this signature, we demonstrate that epitaxy on Al-polar AlN and sapphire yields uniformly Ga-polar (upward Psp) and O-polar (downward Psp) architectures, respectively, whereas deteriorated crystallinity disrupts this registry and triggers mixed-polarity. This atomic-to-macroscopic correlation eliminates long-standing ambiguities regarding absolute polar orientations in non-centrosymmetric oxides. Analogous to mature III-Nitride architectures, this blueprint provides the foundational platform for designing macroscopic polarization discontinuities at heterointerfaces, unlocking ε-Ga2O3 for advanced polarization electronics.