arXiv subjects

Slava Krylov

Publications and source records attributed to Slava Krylov.

6 recordsLinked to original sources

arXiv2024

Self Calibration by ON/OFF Sensitivity Switching - Feasibility Study of a Resonant Accelerometer

This research provides the theoretical feasibility study of a novel architecture of a MEMS differential resonant accelerometer, with switchable and tunable electrostatic transmission between the proof mass and the vibrating sensing beams. The same beams are used for sensing of the inertial force, while the transmission is switched ON, and for the device's calibration, when the transmission is OFF. Therefore, the beams' response in the OFF state is affected by the same factors (temperature, electronics, packaging) as in the ON state, with the only exception for the acceleration. This unique ability to physically disconnect the inertial force from the sensing elements opens possibilities for new schemes of the signal processing, including sensitivity tuning, zero-bias correction and on-the-fly self-calibration of the sensor. The device includes a proof mass (PM) and two force-transmitting frames that are attached to the substrate by the suspension springs, such that there is no direct mechanical connection between the PM and the frames. Two identical sensing beams are attached at their ends to the frames and the substrate. When the electrostatic transmission is switched ON by applying a voltage between the PM and frames, the force is transmitted from the PM through the frame to the beams. Disturbance in the electrostatic field, due to the acceleration-dependent displacement of the PM, results in the shift in the beam axial force and, therefore, in its resonant frequency, assuring the device's acceleration sensing. Furthermore, the change in the control voltage tunes the transmission of the input signal, and therefore the scale factor and the dynamic range of the sensor. An analytic model of the generic device is formulated and verified using finite elements analysis. The tunability of the device and the compensation of the scale factor thermal sensitivity are demonstrated using the model.

eess.SP↗

arXiv2023

Piezoresistive snap-through detection for bifurcation-based MEMS sensors

We report on the piezoresistive method for detecting stability loss events in microelectromechanical (MEMS) sensors based on bifurcation. The method involves measuring the resistivity changes of an entire beam to detect snap-through transitions in an electrostatically actuated, bistable double-clamped crystalline Silicon (Si) microbeam. The applicability of the suggested approach in two types of sensors - an ambient air temperature sensor or a mean air velocity sensor, is demonstrated. In both cases the bistable beam, serving as the sensing element, is affected by the electrothermal Joule's heating and air cooling. The measured signal is obtained by monitoring the critical voltages of the snap-through transitions. Piezoresistive sensing is especially suitable for the response monitoring of the exposed to the environment, free-standing heated microbeam sensors, where optical, piezoelectric, or electrostatic interrogation methods are not applicable. The approach can be implemented in various bifurcation microsensors and for response monitoring of bistable actuators.

physics.app-ph↗

arXiv2023

Effect of Overheat and Direct Flow Loading on the MEMS Bistable Flow Sensor

We present the findings from an experimental study of a MEMS flow sensor in which an initially curved, double-clamped bistable microbeam is the primary sensing element. Our research explores how the overheat ratio, direct flow loading, and turbulence-induced vibration affect the sequential snap-through (ST) buckling and snap-back (SB) release of an electrostatically actuated beam heated by an electric current. The sensor is fabricated from highly doped single-crystal silicon using a silicon-on-insulator (SOI) wafer. Positioned at the chip's edge, the microbeam is exposed to airflow, enabling concurrent dynamic response measurements with a laser Doppler vibrometer and a video camera. Our research demonstrates that the overheat ratio can be significantly lower for this sensing principle than conventional thermal sensing elements, pointing to the potential for substantial energy savings. We also emphasize the significant impact of flow angles and vibrations on the critical ST and SB voltages, which are vital for the flow sensor's output. Additionally, we introduce the first direct experimental observation of the beam profile's time history during the snap-through /snap-back transition. The potential impact of this research lies in developing more robust MEMS flow sensors with enhanced sensitivity and a better understanding of their response to environmental factors, which could have broader applications in fields such as aerospace, environmental monitoring, and industrial process control.

physics.app-ph↗

arXiv2018

Flow sensor based on the snap-through detection of a curved micromechanical beam

We report on a flow velocity measurement technique based on snap-through detection of an electrostatically actuated, bistable micromechanical beam. We show that induced elecro-thermal Joule heating and the convective air cooling change the beam curvature and consequently the critical snap-through voltage ($V_{ST}$). Using single crystal silicon beams, we demonstrate the snap-through voltage to flow velocity sensitivity of $dV_{\text{ST}}/du \approx0.13$ V s m$^{-1}$ with a power consumption of $\approx360\; \mu$W. Our experimental results were in accord with the reduced order, coupled, thermo-electro-mechanical model prediction. We anticipate that electrostatically induced snap-through in curved, micromechanical beams will open new directions for the design and implementation of downscaled flow sensors for autonomous applications and environmental sensors.

physics.app-ph↗

arXiv2016

Flow sensing by buckling monitoring of electrothermally actuated double-clamped micro beams

We report on a flow sensing approach based on deflection monitoring of micro beams buckled by the compressive thermal stress due to electrothermal Joules heating. The air stream convectively cooling the device affects both the critical buckling values of the electric current and the postbuckling deflections of the structure. After calibration, the flow velocity was obtained from the deflections measurements. The quasi-static responses of 2000 microns long, 10 microns wide and 30 microns high single crystal silicon beam transduced using image processing were consistent with the prediction of the reduced order model, which couples thermoelectric, thermofluidic and structural domains. The deflection sensitivity of 1.5 microns/(m/s) and the critical current sensitivity of 0.4 mA/(m/s) were registered in the experiments. Our model and experimental results collectively demonstrate feasibility of the sensing approach and further suggest that simple, robust and potentially downscalable beam-type devices may have use in flow velocity and wall shear stress sensors.

physics.flu-dyn↗

arXiv2011

Synchronous imaging for rapid visualization of complex vibration profiles in electromechanical microresonators

Synchronous imaging is used in dynamic space-domain vibration profile studies of capacitively driven, thin n+ doped poly-silicon microbridges oscillating at rf frequencies. Fast and high-resolution actuation profile measurements of micromachined resonators are useful when significant device nonlinearities are present. For example, bridges under compressive stress near the critical Euler value often reveal complex dynamics stemming from a state close to the onset of buckling. This leads to enhanced sensitivity of the vibration modes to external conditions, such as pressure, temperatures, and chemical composition, the global behavior of which is conveniently evaluated using synchronous imaging combined with spectral measurements. We performed an experimental study of the effects of high drive amplitude and ambient pressure on the resonant vibration profiles in electrically-driven microbridges near critical buckling. Numerical analysis of electrostatically driven post-buckled microbridges supports the richness of complex vibration dynamics that are possible in such micro-electromechanical devices.

cond-mat.mes-hall↗