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Shui-Qing Yu

Publications and source records attributed to Shui-Qing Yu.

At least 19 recordsLinked to original sources

Investigation of GeSn aspect ratio trapping growth up to 8% Sn

Aspect ratio trapping (ART) growth of germanium-tin (GeSn) is a promising approach to target important objectives on the quest towards commercialization of complementary metal-oxide-semiconductor (CMOS)-compatible GeSn optoelectronics devices. Its local growth on patterned substrate allows for versatile device integration into photonics integrated circuit or for stand-alone structure like focal plane array imager. Additionally, high aspect ratio from nano-sized window can terminate early threading dislocation propagation on the oxide sidewalls, leaving subsequent growth defect-free and potentially improving the device performance. Knowledge remains missing regarding GeSn ART growth kinetics, morphology and how they evolve from thin film growth, with successful growth itself yet to be demonstrated. In this work, we report GeSn ART growth up to 8% Sn. Two configurations -- self-induced Ge core/GeSn shell for Sn content between 6% and 8%, and bulk GeSn ART for Sn content below 1% -- are observed. We present a comprehensive study on GeSn ART growth kinetics through different growth rounds and designs, showing a link between pyramid shape of ART island and successful Sn incorporation, as well as the role of growth selectivity and local heating.

cond-mat.mtrl-sci

BDIP-Net: Dual-Interaction Graph Learning for Property Prediction of Bilayer Materials

Stacked bilayer materials exhibit rich stacking-dependent properties driven by the interplay between strong intra-layer bonding and weak inter-layer van der Waals interactions. The computational discovery of such materials is challenging because accurate structure generation typically relies on expensive DFT-based optimization, while existing machine-learning models often fail to explicitly distinguish different interaction types during property prediction. To address these challenges, we propose a machine-learning framework for efficient construction and property prediction of stacked bilayer materials. The framework employs a MatterSim-D3-based structural optimization workflow to generate DFT-quality bilayer structures from monolayer building blocks and stacking configurations at substantially reduced computational cost. For property prediction, we introduce BDIP-Net (Bilayer Dual-Interaction Potential Network), a graph neural network that explicitly models intra-layer and inter-layer interactions through interaction-specific potential representations and adaptive message fusion. We evaluate the proposed framework on BiDB, HetDB, and SAMBA, encompassing homobilayers, heterobilayers, and twisted bilayer systems. Results show that the MatterSim-D3-based workflow closely reproduces DFT-PBE-D3 optimized structures, while BDIP-Net consistently outperforms existing graph neural network and potential-based approaches for bilayer property prediction.

cs.LG

Study of GeSn Selective Area Growth with Demonstration of SWIR Light Detection

As germanium-tin (GeSn) epitaxial growth quality continuously improves, the search for an efficient integration strategy of GeSn optoelectronics devices into complementary metal-oxide-semiconductor (CMOS) manufacturing line also accelerates. Selective area growth (SAG) on patterned substrate emerges as a promising approach for this quest, with locally controlled growth of GeSn laser/detector suitable for either co-integration with silicon-based waveguide structure or stand-alone module like focal plane array. In this work, we report successful GeSn SAG with Sn content ranging from 3.2% to 8.7% of good optical quality, with demonstration of tunable GeSn SAG photoluminescence and GeSn SAG photoconductor device, the latter with detection cutoff wavelength up to 2 um. In addition, we present a comprehensive study of GeSn SAG condition at different window sizes, from 2 um to 100 um, and shapes: circle, square, octagon, and rectangle. Presence of loading effect is revealed, where GeSn growth rate increases as pattern fill factor and window size shrink. It introduces a different growth condition compared to thin film growth, which can weaken or inhibit Sn incorporation at very small window size and induce Sn segregation in high Sn content SAG growth.

physics.app-ph

Magneto-optical characterization of GeSn and GeSn/SiGeSn heterostructures

Hole spin qubits in germanium (Ge)-based heterostructures have demonstrated their potential for scalable quantum information processing using all-electrical gate operations. Furthermore, the emerging material platform of germanium-tin (GeSn) can feature a direct bandgap, which makes it promising for establishing spin-photon interfaces for quantum networking. Here, we perform magneto-photoluminescence measurements of a Ge0.88Sn0.12/Si0.02Ge0.89Sn0.09 double quantum well using the double modulation Fourier transform infrared-based photoluminescence spectroscopy. Our measurements reveal theoretically expected diamagnetic shift at low magnetic fields as well as the linear trend of zeroth-level Landau quantization at higher fields and Zeeman-induced polarization-dependent energy shifts at +/- 12 T. We extract an effective g-factor of ~ 2 and an excitonic reduced mass of ~ 0.04 me consistent with previous estimations for heavy-hole {\Gamma}-valley excitons. The observation of sizable Zeeman splitting is consistent with strong spin-orbit interaction in Ge-based hole systems, which can enable electrically driven spin control. Our analysis can be adopted for studying and evaluating group-IV semiconductor heterostructures as hosts for hole spin qubits toward scalable quantum information processing.

quant-ph

Germanium-tin (GeSn) avalanche photodiode with up to 2.7 micro cutoff wavelength for extended SWIR detection

Separate absorption charge multiplication germanium tin on silicon avalanche photodiode offers a viable solution to achieve CMOS compatible, high sensitivity detection technology in SWIR or extended SWIR range, leveraging the excellent k-factor of Si as multiplication layer and SWIR or e-SWIR band absorption of GeSn. However, unlike well-established growth of GeSn on Si with thick Ge buffer in-between to reduce threading dislocation density due to lattice mismatch, GeSn on Si APD design requires relatively thin Ge buffer to limit electric field drop through the background p-doped buffer and efficiently transporting photocarrier from GeSn absorber to Si multiplication layer, therefore making growth of high Sn content APD for e-SWIR coverage very challenging. In this work, we experimentally demonstrate GeSn on Si APD up to 12.7 percent Sn, monolithically grown on Si substrate with 122-nm-thick Ge buffer in between, which is considerably thinner than widely used 700-900 nm thick Ge buffer. Stronger relaxation of GeSn absorber via thin Ge buffer favors Sn incorporation, leading to higher Sn content than the nominal target of 8 percent Sn. Device detection range is significantly improved compared to previous work - with cutoff wavelength increased up to 2.7 micro at 300 K, in parallel with high avalanche gain at 77 K up to 21 at 1.55 micro and up to 52 at 2 micro, and good responsivity in SWIR or e-SWIR range, up to 1.45 AW-1 at 1.55 micro and 0.66 AW-1 at 2 micro.

physics.app-ph

Systematic study of high performance GeSn photodiodes with thick absorber for SWIR and extended SWIR detection

Germanium-tin (GeSn) photodiodes potentiate a viable solution to integrate SWIR and extended SWIR detection technology into CMOS processing line. However, challenges in the growth of thick, high quality GeSn limit the device absorber thickness, making it impossible to ascertain the performance limit of GeSn photodiodes. An in-depth understanding of their device physics and a clear optimization pathway towards commercial-grade devices remain elusive. This work presents a systematic empirical study of GeSn photodiodes with thick absorber (2 to 8% Sn content, up to 2630 nm thick), showing high responsivity up to 0.59 A.W-1 at 1.55 {\mu}m and 0.43 A.W-1 at 2 {\mu}m wavelengths, low dark current density down to 2 x 10-2 A.cm-2, and high detection cutoff wavelengths up to 2.1 and 2.5 {\mu}m at 5% and 8% Sn, respectively. Using specific doping design (P-i-N and N-i-P), an in-depth analysis is presented on the impact of junction position, p-type background carrier concentration, bulk/ surface defects and photocarrier diffusion length - on photodetection performance. Different optimization strategies for GeSn photodiodes, in particular at high Sn content, are proposed.

physics.ins-det

Neutralizing Optical Defects in GeSn

Reports of photoluminescence from GeSn grown on Ge substrates by molecular beam epitaxy have been limited. We find that one limiting factor to observing photoluminescence is due to localized defect states marked by photoluminescence at 2400 nm and originating from the Ge substrate and buffer layer. In this study, we report on an optical study utilizing doped Ge(001) substrates to effectively suppress defect-related photoluminescence in GeSn layers by filling localized defect trap states. For this experiment, a GeSn layer with Sn content up to 10.5% was grown on a doped Ge(001) substrate. Analysis of the physics of the photoluminescence spectrum collected from the GeSn thin film shows an emission at the expected wavelength of 2300 nm for 10.5% Sn content and the absence of the typically observed defect related signal at 2400 nm. This understanding is further confirmed using short pulse optical excitation of the GeSn grown on undoped Ge substrates.

cond-mat.mtrl-sci

Ge0.95Sn0.05 on Si avalanche photodiode with Spectral Response Cutoff at 2.14 micrometer

GeSn-based avalanche photodiode (APD) operating in shortwave infrared (SWIR) wavelength was demonstrated in this work. A separate absorption and charge multiplication (SACM) structure was employed to take advantage of long wavelength absorption in GeSn and low impact ionization ratio of Si. Due to lattice mismatch between Si and GeSn that would degrade GeSn material quality if with direct growth, a 240-nm-thick Ge buffer was utilized which simultaneously allows for the transporting photo generated electrons from GeSn absorber to Si multiplication layer. Spectral response showed the cut off wavelength beyond 2.1 {\mu}m at room temperature. Dart current and capacitance-voltage measurements indicated a punch-through voltage of -10 V. The measured responsivities were 0.55 A/W and 0.34 A/W under 1.55 {\mu}m and 1.9 {\mu}m excitation lasers, respectively. The maximum gain was obtained as 3.44 at 77 K under 1.9 {\mu}m laser. Even at 250 K, the calculated gain was greater than unity. Simulation of electric field distribution revealed that the GeSn is partially depleted at operating voltages, which can be improved by reducing the background doping levels in GeSn absorber and Ge buffer layer.

physics.app-ph

Study of electronic band alignment in SiGeSn/GeSn quantum well via internal photoemission effect

SiGeSn-based optoelectronic devices, which operate across a broad infrared wavelength range, have attracted significant attention, particularly heterostructures utilizing quantum wells are widely utilized. In these structures, band alignment type and barrier height are crucial for carrier confinement, making them highly desirable information to obtain. This work leverages the internal photoemission effect to extract effective barrier heights from a Si0.024Ge0.892Sn0.084 / Ge0.882Sn0.118 single quantum well structure, which was pseudomorphically grown on Ge0.9Sn0.1 and Ge buffered Si substrate. The extracted effective barrier heights are approximately 22{plus minus}2 and 50{plus minus}2 meV for electrons and holes, respectively. Moreover, we have identified the type-I band alignment between GeSn well and SiGeSn barrier, as indicated by an internal photoemission threshold of 555 {plus minus} 1 meV.

physics.app-ph

Optoelectronically Active GaAs/GeSn-MQW/Ge Heterojunctions Created via Semiconductor Grafting

Traditionally, advancements in semiconductor devices have been driven by lattice-matched heterojunctions with tailored band alignments through heteroepitaxy techniques. However, there is significant interest in expanding the capabilities of heterojunction devices, in particular utilizing extreme lattice mismatches. We demonstrate the manipulation of device behaviors and performance enhancement achievable through a lattice-mismatched, single-crystalline GaAs/GeSn-multi-quantum well (MQW)/Ge n-i-p heterojunction by employing advanced semiconductor grafting technology. With engineered band alignment and optical field distribution, the grafted GaAs/GeSn-MQW/Ge n-i-p photodiode achieved outstanding performance: a record-low dark current density of 1.22E10^-7 A/cm^2, an extended spectral response from ~0.5 to 2 um, and improved photoresponsivity of RVIS of 0.85 A/W and RNIR of 0.40 A/W at 520 and 1570 nm, respectively. The dark current density is at least 5 orders of magnitude lower than state-of-the-art GeSn photodiodes. The photoresponsivity demonstrates an approximately sevenfold enhancement in the VIS range and a threefold improvement in the NIR range compared to the reference epitaxial photodiode. This work presents a unique strategy for constructing lattice-mismatched semiconductor heterojunction devices. More importantly, the implications transcend the current GaAs/GeSn-MQW/Ge example, offering potential applications in other material systems and freeing device design from the stringent lattice-matching constraints of conventional heteroepitaxy.

cond-mat.mtrl-sci

Direct Bandgap Photoluminescence of GeSn grown on Si(100) substrate by Molecular Beam Epitaxy Growth

Group IV alloys of GeSn have gained significant attention for electronic and optoelectronic applications on a Si platform due to their compatibility with existing CMOS technology, tunable band structure, and potential for a direct bandgap at high Sn concentrations. However, synthesizing Sn-rich GeSn structures remains challenging due to the low solid solubility of Sn in Ge (less than 1%) and the substantial lattice mismatch ( about 14%) between Sn and Ge. In this work, we demonstrate the successful growth of high-quality, relaxed GeSn layers with Sn contents of 9.2% and 11.4% on Si(100) substrates via molecular beam epitaxy (MBE). As far as we know, this is the first report of direct bandgap photoluminescence observed from MBE-grown GeSn films without post-growth annealing. Structural characterizations including X-ray diffraction (XRD), secondary ion mass spectrometry (SIMS), and transmission electron microscopy (TEM) confirm uniform Sn incorporation with minimal defect formation. Atomic force microscopy (AFM) reveals smooth surfaces with low roughness. Temperature-dependent photoluminescence (PL) measurements further confirm direct bandgap emission, representing a new stage in the development of MBE-grown GeSn.

physics.app-ph

Study of Group III-V Waveguides on Sapphire Platform for Photonic Integrated Circuits

Photonic integrated circuits (PICs) have been acknowledged as the promising platforms for the applications in data communication, Lidar in autonomous driving vehicles, innovative sensor technology, etc. Since the demonstration of optical components individually, integration of both electronics and photonics for functional devices on a common platform has been a key technology driver enhancing the stability and scalability of integrated photonic technologies. Recently, we proposed to use sapphire as a high-performance PIC platform, which enables a fully integrated solution to include a complete set of components with light source, modulator, light detection, passive devices, silicon on sapphire control circuit all-in-one sapphire platform to achieve high-performance low-cost mixed-signal optical links. In parallel to developing ac-tive components such as group III-V lasers on sapphire, in this work, the performance of group III-V straight waveguides on sapphire was systemically studied. The refractive indices contrast between GaAs, InP, GaSb, and sapphire are sufficiently high to achieve low loss over a broad optical wavelength. The calculated loss at wavelengths of 1330 nm, 1550 nm, and 2000 nm for the GaAs, InP, and GaSb rib waveguides are 0.32 dB/cm, 0.67 dB/cm, and 0.70 dB/cm, re-spectively. Since the fundamental element to construct all passive building blocks is the straight waveguide, results from this work would allow us to assess other basic passive building blocks.

physics.optics

Grafted AlGaAs/GeSn Optical Pumping Laser Operating up to 130 K

Group IV GeSn double-heterostructure (DHS) lasers offer unique advantages of a direct bandgap and CMOS compatibility. However, further improvements in laser performance have been bottlenecked by limited junction properties of GeSn through conventional epitaxy and wafer bonding. This work leverages semiconductor grafting to synthesize and characterize optically pumped ridge edge-emitting lasers (EELs) with an AlGaAs nanomembrane (NM) transfer-printed onto an epitaxially grown GeSn substrate, interfaced by an ultrathin Al2O3 layer. The grafted AlGaAs/GeSn DHS lasers show a lasing threshold of 11.06 mW at 77 K and a maximum lasing temperature of 130 K. These results highlight the potential of the grafting technique for enhancing charge carrier and optical field confinements, paving the way for room-temperature electrically injected GeSn lasers.

physics.optics

Characterization of AlGaAs/GeSn heterojunction band alignment via X-ray photoelectron spectroscopy

GeSn-based SWIR lasers featuring imaging, sensing, and communications has gained dynamic development recently. However, the existing SiGeSn/GeSn double heterostructure lacks adequate electron confinement and is insufficient for room temperature lasing. The recently demonstrated semiconductor grafting technique provides a viable approach towards AlGaAs/GeSn p-i-n heterojunctions with better electron confinement and high-quality interfaces, promising for room temperature electrically pumped GeSn laser devices. Therefore, understanding and quantitatively characterizing the band alignment in this grafted heterojunction is crucial. In this study, we explore the band alignment in the grafted monocrystalline Al0.3Ga0.7As /Ge0.853Sn0.147 p-i-n heterojunction. We determined the bandgap values of AlGaAs and GeSn to be 1.81 eV and 0.434 eV by photoluminescence measurements, respectively. We further conducted X-ray photoelectron spectroscopy measurements and extracted a valence band offset of 0.19 eV and a conduction band offset of 1.186 eV. A Type-I band alignment was confirmed which effectively confining electrons at the AlGaAs/GeSn interface. This study improves our understanding of the interfacial band structure in grafted AlGaAs/GeSn heterostructure, providing experimental evidence of the Type-I band alignment between AlGaAs and GeSn, and paving the way for their application in laser technologies.

physics.app-ph

AlGaAs/GeSn p-i-n diode interfaced with ultrathin Al$_2$O$_3$

This study presents the fabrication and characterizations of an Al$_{0.3}$Ga$_{0.7}$As/Ge$_{0.87}$Sn$_{0.13}$/GeSn p-i-n double heterostructure (DHS) diode following the grafting approach for enhanced optoelectronic applications. By integrating ultra-thin Al$_2$O$_3$ as a quantum tunneling layer and enhancing interfacial double-side passivation, we achieved a heterostructure with a substantial 1.186 eV conduction band barrier between AlGaAs and GeSn, along with a low interfacial density of states. The diode demonstrated impressive electrical characteristics with high uniformity, including a mean ideality factor of 1.47 and a mean rectification ratio of 2.95E103 at +/-2 V across 326 devices, indicating high-quality device fabrication. Comprehensive electrical characterizations, including C-V and I-V profiling, affirm the diode's capability to provide robust electrical confinement and efficient carrier injection. These properties make the Al$_{0.3}$Ga$_{0.7}$As/Ge$_{0.87}$Sn$_{0.13}$/GeSn DHS a promising candidate for next-generation electrically pumped GeSn lasers, potentially operable at higher temperatures. Our results provide a viable pathway for further advancements in various GeSn-based devices.

physics.app-ph

Atomic short-range order: a new degree of freedom for band engineering of GeSn semiconductor alloys

Chemical short-range order (SRO) in alloys denotes the statistical preference or avoidance between atomic species on neighboring lattice sites. Here, we highlight SRO as a powerful new mechanism for semiconductor alloy band engineering. Atom probe tomography reveals a significantly higher probability of Sn-Sn first nearest neighbors (1NNs) in thin-film GeSn alloys grown by molecular beam epitaxy (MBE) vs. chemical vapor deposition (CVD). Remarkably, although lower Sn concentration typically widens the bandgap, we find that the stronger presence of Sn-Sn 1NN pairs in MBE samples overrides this trend, resulting in a narrower bandgap despite having 2 at.\% lower Sn content than CVD samples. First-principles modeling corroborates this effect, attributing these SRO variations to distinctive surface terminations and growth temperatures between MBE and CVD. These findings establish SRO as a new degree of freedom for semiconductor band engineering beyond composition, strain, and quantum confinement, unlocking novel device mechanisms for the post-Moore era.

cond-mat.mtrl-sci

Monolithic Germanium Tin on Si Avalanche Photodiodes

We demonstrate monolithically grown germanium-tin (GeSn) on silicon avalanche photodiodes (APDs) for infrared light detection. A relatively thinner Ge buffer design was adopted to allow effective photo carriers to transport from the GeSn absorber to the Si multiplication layer such that clear punch-through behavior and a saturated primary responsivity of 0.3 A/W at 1550 nm were observed before avalanche breakdown in GeSn/Si APDs for the first time. The spectral response covers 1500 to 1700 nm. The measured punch-through and breakdown voltages are 15 and 17 V, respectively. Undisputed multiplication gain was obtained with the maximum value of 4.5 at 77 K, and 1.4 at 250 K, directly in reference to the saturated primary responsivity from the same device rather than a different GeSn p-i-n photodiode in previous reports. A peak responsivity was measured as 1.12 A/W at 1550 nm and 77 K.

cond-mat.mtrl-sci

Electrically Injected mid-infrared GeSn laser on Si operating at 140 K

Owing to its true direct bandgap and tunable bandgap energies,GeSn alloys are increasingly attractive as gain media for mid-IR lasers that can be monolithically integrated on Si. Demonstrations of optically pumped GeSn laser at room under pulsed condition and at cryogenic temperature under continuous-wave excitation show great promise of GeSn lasers to be efficient electrically injected light sources on Si. Here we report electrically injected GeSn lasers using Fabry-Perot cavity with 20, 40, and 80 micron ridge widths. A maximum operating temperature of 140 K with lasing threshold of 0.756 kA/cm2 at 77 K and emitting wavelength of 2722 nm at 140 K was obtained. The lower threshold current density compared to previous works was achieved by reducing optical loss and improving the optical confinement. The peak power was measured as 2.2 mW/facet at 77 K.

physics.optics