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Johnathon D. Gard

Publications and source records attributed to Johnathon D. Gard.

9 recordsLinked to original sources

A tabletop x-ray tomography instrument for nanometer-scale imaging: demonstration of the 1,000-element transition-edge sensor subarray

We report on the 1,000-element transition-edge sensor (TES) x-ray spectrometer implementation of the TOMographic Circuit Analysis Tool (TOMCAT). TOMCAT combines a high spatial resolution scanning electron microscope (SEM) with a highly efficient and pixelated TES spectrometer to reconstruct three-dimensional maps of nanoscale integrated circuits (ICs). A 240-pixel prototype spectrometer was recently used to reconstruct ICs at the 130 nm technology node, but to increase imaging speed to more practical levels, the detector efficiency needs to be improved. For this reason, we are building a spectrometer that will eventually contain 3,000 TES microcalorimeters read out with microwave superconducting quantum interference device (SQUID) multiplexing, and we currently have commissioned a 1,000 TES subarray. This still represents a significant improvement from the 240-pixel system and allows us to begin characterizing the full spectrometer performance. Of the 992 maximimum available readout channels, we have yielded 818 devices, representing the largest number of TES x-ray microcalorimeters simultaneously read out to date. These microcalorimeters have been optimized for pulse speed rather than purely energy resolution, and we measure a FWHM energy resolution of 14 eV at the 8.0 keV Cu K$\alpha$ line.

physics.ins-det

Nanoscale Three-Dimensional Imaging of Integrated Circuits using a Scanning Electron Microscope and Transition-Edge Sensor Spectrometer

X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but is difficult to implement due to competing requirements on X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while changing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot in a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with high signal-to-noise. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enable nanoscale, element-specific X-ray imaging in a compact footprint. The proof-of-concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in 6 layers of a Cu-SiO2 integrated circuit, and a path towards finer resolution and enhanced imaging capabilities is discussed.

physics.ins-det

Design of a 3000-pixel transition-edge sensor x-ray spectrometer for microcircuit tomography

Feature sizes in integrated circuits have decreased substantially over time, and it has become increasingly difficult to three-dimensionally image these complex circuits after fabrication. This can be important for process development, defect analysis, and detection of unexpected structures in externally sourced chips, among other applications. Here, we report on a non-destructive, tabletop approach that addresses this imaging problem through x-ray tomography, which we uniquely realize with an instrument that combines a scanning electron microscope (SEM) with a transition-edge sensor (TES) x-ray spectrometer. Our approach uses the highly focused SEM electron beam to generate a small x-ray generation region in a carefully designed target layer that is placed over the sample being tested. With the high collection efficiency and resolving power of a TES spectrometer, we can isolate x-rays generated in the target from background and trace their paths through regions of interest in the sample layers, providing information about the various materials along the x-ray paths through their attenuation functions. We have recently demonstrated our approach using a 240 Mo/Cu bilayer TES prototype instrument on a simplified test sample containing features with sizes of $\sim$1 $\mu$m. Currently, we are designing and building a 3000 Mo/Au bilayer TES spectrometer upgrade, which is expected to improve the imaging speed by factor of up to 60 through a combination of increased detector number and detector speed.

physics.ins-det

Absolute Energy Measurements with Superconducting Transition-Edge Sensors for Muonic X-ray Spectroscopy at 44 keV

Superconducting transition-edge sensor (TES) microcalorimeters have great utility in x-ray applications owing to their high energy resolution, good collecting efficiency and the feasibility of being multiplexed into large arrays. In this work, we develop hard x-ray TESs to measure the absolute energies of muonic-argon ($\mu$-Ar) transition lines around 44 keV and 20 keV. TESs with sidecar absorbers of different heat capacities were fabricated and characterized for their energy resolution and calibration uncertainty. We achieved ~ 1 eV absolute energy measurement accuracy at 44 keV, and < 12 eV energy resolution at 17.5 keV.

physics.ins-det

Quantification of 242Pu with a Microcalorimeter Gamma Spectrometer

We report measurements of the 103-keV and 159-keV gamma ray signatures of 242Pu using microcalorimetry. This is the first observation of these gamma rays in a non-destructive measurement of an unprepared sample, and so represents an important advance in nuclear material accountancy. The measurement campaign also serves as the first demonstration of a field campaign with a portable microcalorimeter gamma-ray spectrometer. For the 103-keV gamma ray we report an improved centroid energy and emission probability.

physics.ins-det

New Experimentally Observable Gamma-ray Emissions from 241Am Nuclear Decay

With the high resolution of microcalorimeter detectors, previously unresolvable gamma-ray lines are now clearly resolvable. A careful measurement of Am-241 decay with a large array of gamma-ray microcalorimeters has revealed never before seen or predicted gamma lines at 207.72 +/- 0.02 keV and 208.21 +/- 0.01 keV. These results were made possible by new microwave-multiplexing readout to increase the array size and improved analysis algorithms to eliminate spectral artifacts. We suggest nuclear levels from which these gamma-rays might originate and calculate branching ratios for these transitions from measurements of both mixed Pu-Am standards and a pure Am-241 source. These results have implications for nuclear material safeguards and accounting, particularly for microcalorimeter gamma spectrometers, which are now being adopted in nuclear safeguards analytical laboratories.

nucl-ex

Improved Plutonium and Americium Photon Branching Ratios from Microcalorimeter Gamma Spectroscopy

Photon branching ratios are critical input data for activities such as nuclear materials protection and accounting because they allow material compositions to be extracted from measurements of gamma-ray intensities. Uncertainties in these branching ratios are often a limiting source of uncertainty in composition determination. Here, we use high statistics, high resolution (~60-70eV full-width-at-half-maximum at 100 keV) gamma-ray spectra acquired using microcalorimeter sensors to substantially reduce the uncertainties for 11 plutonium (238Pu,239Pu,241Pu) and 241Am branching ratios important for material control and accountability and nuclear forensics in the energy range of 125 keV to 208 keV. We show a reduction in uncertainty of over a factor of three for one branching ratio and a factor of 2{3 for four branching ratios.

nucl-ex

A Model for Excess Johnson Noise in Superconducting Transition-edge Sensors

Transition-Edge Sensors (TESs) are two-dimensional superconducting films used to detect energy or power. TESs are voltage biased in the resistive transition where the film resistance is both finite and a strong function of temperature. Electrical noise is observed in TESs that exceeds the predictions of existing noise theories. In this manuscript, we describe a model for the unexplained excess noise based on the dynamic resistance of the TES and noise mixed down from frequencies around the Josephson oscillations. We derive an expression for the power spectral density of this noise and show that its predictions match measured data.

cond-mat.supr-con

L-Edge Spectroscopy of Dilute, Radiation-Sensitive Systems Using a Transition-Edge-Sensor Array

We present X-ray absorption spectroscopy and resonant inelastic X-ray scattering (RIXS) measurements on the iron L-edge of 0.5 mM aqueous ferricyanide. These measurements demonstrate the ability of high-throughput transition-edge-sensor (TES) spectrometers to access the rich soft X-ray (100-2000eV) spectroscopy regime for dilute and radiation-sensitive samples. Our low-concentration data are in agreement with high-concentration measurements recorded by conventional grating-based spectrometers. These results show that soft X-ray RIXS spectroscopy acquired by high-throughput TES spectrometers can be used to study the local electronic structure of dilute metal-centered complexes relevant to biology, chemistry and catalysis. In particular, TES spectrometers have a unique ability to characterize frozen solutions of radiation- and temperature-sensitive samples.

physics.ins-det