arXiv subjects

J. Sheil

Publications and source records attributed to J. Sheil.

6 recordsLinked to original sources

arXiv2026

Beyond-EUV spectrum of highly-charged gadolinium

We report ab initio relativistic calculations on the complex Gd$^{18+}$ and Gd$^{26+}$ highly-charged ions, which are relevant to beyond-extreme-ultraviolet (BEUV) light sources based on laser-produced gadolinium plasmas. Using the particle-hole configuration-interaction with many-body perturbation theory (CI+MBPT) method, we systematically saturate the $n=4$ configuration space and determine the influence of multiply excited states on the emissivity spectrum. For Gd$^{26+}$ we find behavior analogous to that of its isoelectronic counterpart Sn$^{12+}$, with strong contributions from multiply excited states, where even the quadruply excited states become significant at certain effective temperatures. In contrast, the industry-relevant 6.7 nm emission of Pd-like Gd$^{18+}$ is dominated by the singly excited $4d^{10} {\ }^{1}S_{0}$ -- $4d^{9}4f {\ }^{1}P_{1}$ transition, while multiply excited states primarily contribute to out-of-band emission. The calculated spectra show good agreement with experiment and demonstrate that the importance of multiply excited states depends strongly on both charge state and plasma conditions.

physics.atom-ph↗

arXiv2026

Resolving the Blueshift in Calculations of the EUV Spectrum of Multiply Charged Tin Ions

We report ab initio relativistic calculations on the complex open shell Sn$^{12+}$ highly charged ion, a prototypical plasma ion relevant for extreme ultraviolet (EUV) nanolithography. Previous calculations of EUV emissivity in tin plasmas consistently generate a spectrum in which the region of peak emissivity is blueshifted relative to experiment. By optimising our numerical methods to take full advantage of modern, high-performance CPU architectures, we are able to completely saturate the configuration interaction within the $n=4$ shell. Coupled with a thorough treatment of core-valence correlation we resolve the blueshift, finding a surprisingly large influence of highly excited states on the spectrum that is dominated by multiply excited states.

physics.atom-ph↗

arXiv2022

Characterization of plasmas driven by laser wavelengths in the 1.064-10.6 $\mu$m range as future extreme ultraviolet light sources

We characterize the properties of extreme ultraviolet (EUV) light source plasmas driven by laser wavelengths in the $\lambda_{\mathrm{laser}} = 1.064 - 10.6 $ $\mu$m range. Detailed numerical simulations of laser-irradiated spherical tin microdroplet targets reveal a strong laser-wavelength dependence on laser light absorptivity and the conversion efficiency of generating EUV radiation. Radiative losses are found to dominate the power balance for all laser wavelengths, and a clear shift from kinetic to in-band radiative losses with increasing laser wavelength is identified. We find that the existence of maximum conversion efficiency, near $ \lambda_{\mathrm{laser}} = 4 $ $\mu$m, originates from the interplay between the optical depths of the laser light and the in-band EUV photons for this specific target geometry.

physics.plasm-ph↗

arXiv2022

Review of the 1st EUV Light Sources Code Comparison Workshop

We review the results of the 1st Extreme Ultraviolet (EUV) Light Sources Code Comparison Workshop, which was held online on 3rd November 2020. The goal of this workshop was to provide a platform for specialists in EUV light source plasma modeling to benchmark and validate their numerical codes using well-defined case studies. Eight institutions spanning four countries contributed data to the workshop. Two topics were addressed, namely (i) the atomic kinetics and radiative properties of tin plasmas under EUV-generating conditions and (ii) laser absorption in a fully ionized, one-dimensional hydrogen plasma. In this paper, we summarize the key findings of the workshop and outline plans for future iterations of this code comparison activity.

physics.plasm-ph↗

arXiv2021

Characterization of angularly resolved EUV emission from 2-$\mu$m-wavelength laser-driven Sn plasmas using preformed liquid disk targets

The emission properties of tin plasmas, produced by the irradiation of preformed liquid tin targets by several-ns-long 2-$\mu$m-wavelength laser pulses, are studied in the extreme ultraviolet (EUV) regime. In a two-pulse scheme, a pre-pulse laser is first used to deform tin microdroplets into thin, extended disks before the main (2$\mu$m) pulse creates the EUV-emitting plasma. Irradiating 30- to 300-$\mu$m-diameter targets with 2-$\mu$m laser pulses, we find that the efficiency in creating EUV light around 13.5nm follows the fraction of laser light that overlaps with the target. Next, the effects of a change in 2-$\mu$m drive laser intensity (0.6-1.8$\times 10^{11}$W/cm$^2$) and pulse duration (3.7-7.4ns) are studied. It is found that the angular dependence of the emission of light within a 2\% bandwidth around 13.5nm and within the backward 2$\pi$ hemisphere around the incoming laser beam is almost independent of intensity and duration of the 2-$\mu$m drive laser. With increasing target diameter, the emission in this 2\% bandwidth becomes increasingly anisotropic, with a greater fraction of light being emitted into the hemisphere of the incoming laser beam. For direct comparison, a similar set of experiments is performed with a 1-$\mu$m-wavelength drive laser. Emission spectra, recorded in a 5.5-25.5nm wavelength range, show significant self-absorption of light around 13.5nm in the 1-$\mu$m case, while in the 2-$\mu$m case only an opacity-related broadening of the spectral feature at 13.5nm is observed. This work demonstrates the enhanced capabilities and performance of 2-$\mu$m-driven plasmas produced from disk targets when compared to 1-$\mu$m-driven plasmas, providing strong motivation for the use of 2-$\mu$m lasers as drive lasers in future high-power sources of EUV light.

physics.plasm-ph↗

arXiv2020

Characterization of 1- and 2-$\mu$m-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light

Experimental spectroscopic studies are presented, in a 5.5--25.5nm extreme-ultraviolet (EUV) wavelength range, of the light emitted from plasma produced by the irradiation of tin microdroplets by 5-ns-pulsed, 2-$\mu$m-wavelength laser light. Emission spectra are compared to those obtained from plasma driven by 1-$\mu$m-wavelength Nd:YAG laser light over a range of laser intensities spanning approximately $0.3-5 \times 10^{11}$Wcm$^{-2}$, under otherwise identical conditions. Over this range of drive laser intensities, we find that similar spectra and underlying plasma charge state distributions are obtained when keeping the ratio of 1-$\mu$m to 2-$\mu$m laser intensities fixed at a value of 2.1(6), which is in good agreement with RALEF-2D radiation-hydrodynamic simulations. Our experimental findings, supported by the simulations, indicate an approximately inversely proportional scaling $\sim \lambda^{-1}$ of the relevant plasma electron density, and of the aforementioned required drive laser intensities, with drive laser wavelength $\lambda$. This scaling also extends to the optical depth that is captured in the observed changes in spectra over a range of droplet diameters spanning 16-51$\mu$m at a constant laser intensity that maximizes the emission in a 2\% bandwidth around 13.5nm relative to the total spectral energy, the bandwidth relevant for EUV lithography. The significant improvement of the spectral performance of the 2-$\mu$m- vs 1-$\mu$m driven plasma provides strong motivation for the development of high-power, high-energy near-infrared lasers to enable the development of more efficient and powerful sources of EUV light.

physics.plasm-ph↗