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A Study of Monolithic CMOS Pixel Sensors Back-thinning and their Application for a Pixel Beam Telescope

Marco Battaglia·Devis Contarato·Piero Giubilato·Leo Greiner·Lindsay Glesener·Benjamin Hooberman
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Abstract

This paper reports results on a detailed study of charge collection and signal-to-noise performance of CMOS monolithic pixel sensors before and after back-thinning and their application in a pixel beam telescope for the ALS 1.5 GeV $e^-$ beam test facility.

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Marco Battaglia, Devis Contarato, Piero Giubilato, Leo Greiner, Lindsay Glesener, Benjamin Hooberman. 2006-11-08. A Study of Monolithic CMOS Pixel Sensors Back-thinning and their Application for a Pixel Beam Telescope. https://doi.org/10.1016/j.nima.2007.05.276

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