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High-precision Absolute Distance and Vibration Measurement using Frequency Scanned Interferometry

Hai-Jun Yang·Jason Deibel·Sven Nyberg·Keith Riles
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Abstract

In this paper, we report high-precision absolute distance and vibration measurements performed with frequency scanned interferometry using a pair of single-mode optical fibers. Absolute distance was determined by counting the interference fringes produced while scanning the laser frequency. A high-finesse Fabry-Perot interferometer(F-P) was used to determine frequency changes during scanning. Two multiple-distance-measurement analysis techniques were developed to improve distance precision and to extract the amplitude and frequency of vibrations. Under laboratory conditions, measurement precision of $\sim$ 50 nm was achieved for absolute distances ranging from 0.1 meters to 0.7 meters by using the first multiple-distance-measurement technique. The second analysis technique has the capability to measure vibration frequencies ranging from 0.1 Hz to 100 Hz with amplitude as small as a few nanometers, without a priori knowledge.

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Hai-Jun Yang, Jason Deibel, Sven Nyberg, Keith Riles. 2004-11-26. High-precision Absolute Distance and Vibration Measurement using Frequency Scanned Interferometry. https://doi.org/10.1364/ao.44.003937

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