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Nanomechanical resonators operating as charge detectors in the nonlinear regime

H. Kroemmer·A. Erbe·A. Tilke·S. Manus·R. H. Blick
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Abstract

We present measurements on nanomechanical resonators machined from Silicon-on-Insulator substrates. The resonators are designed as freely suspended Au/Si beams of lengths on the order of 1 - 4 um and a thickness of 200 nm. The beams are driven into nonlinear response by an applied modulation at radio frequencies and a magnetic field in plane. The strong hysteresis of the magnetomotive response allows sensitive charge detection by varying the electrostatic potential of a gate electrode.

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H. Kroemmer, A. Erbe, A. Tilke, S. Manus, R. H. Blick. 1999-10-21. Nanomechanical resonators operating as charge detectors in the nonlinear regime. https://doi.org/10.1209/epl%2Fi2000-00241-3

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