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Interface-anisotropy induced asymmetry of intermixing in bilayers

P. Süle·M. Menyhárd·L. Kótis·J. Lábár·W. F. Egelhoff Jr
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Abstract

The ion-sputtering induced intermixing is studied by molecular dynamics (MD) simulations and by Auger electron spectroscopy depth profiling (AES-DP) analysis in Pt/Ti/Si substrate (Pt/Ti) and Ta/Ti/Pt/Si substrate (Ti/Pt) multilayers. Experimental evidence is found for the asymmetry of intermixing in Pt/Ti and in Ti/Pt. An unexpected enhancement of the injection of the heavy Pt atoms into the Ti substrate is observed both by AES-DP and by MD simulations. In Ti/Pt we get a much weaker interdiffusion than in Pt/Ti. The asymmetry is explained by the backscattering of hyperthermal particles at the mass-anisotropic interface and which is reproduced by computer atomistic simulations. The AES-DP measurements support our earlier predictions (P. Süle, M. Menyhárd, Phys. Rev., {\bf B71}, 113413 (2005)) obtained for mass-anisotropic bilayers.

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P. Süle, M. Menyhárd, L. Kótis, J. Lábár, W. F. Egelhoff Jr. 2005-10-04. Interface-anisotropy induced asymmetry of intermixing in bilayers. https://arxiv.org/abs/cond-mat/0510077

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