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arXiv · 2610.25839

High-Efficiency Silicon-Lithium Niobate Grating Coupler enabled by Fully-Etched Subwavelength Structures

Jing Wang·Yang Liu·Shitong Su·Weiwen Zou
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Abstract

A new approach of silicon-lithium niobate (Si-LN) grating couplers (GCs) with a fully-etched structure is proposed. The coupling strength is engineered through subwavelength structures, allowing improved directionality. The adjoint-based inverse design method is simultaneously adopted to achieve efficient coupling between photonic circuits and fibers. Considering the birefringence of LN, the proposed Si-LN GCs are optimized and fabricated for TE mode along the crystallographic Z and Y directions. The experimentally measured coupling efficiencies are -3.3 dB and -3.9 dB along the crystallographic Z and Y directions, respectively. The measured 3-dB bandwidths are broader than 54 nm and the back reflections can be suppressed down to -15 dB over 50 nm for both directions. The proposed Si-LN GCs are realized by only single-step Si etching, offering a practical solution for fast device prototyping in Si-LN photonic integrated circuits.

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Jing Wang, Yang Liu, Shitong Su, Weiwen Zou. 2026-10-19. High-Efficiency Silicon-Lithium Niobate Grating Coupler enabled by Fully-Etched Subwavelength Structures. https://arxiv.org/abs/2610.25839

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