Shear SAW piezoelectricity of single-crystalline $\mathrm{LiNbO_3}$ films grown on $42^{\circ}$ YX-$\mathrm{LiTaO_3}$ substrates by DLI-CVD

Mikhail Mirushchenko; Roland Salut; Ludovic Gauthier-Manuel; Vincent Astié; Samuel Margueron; Jean-Manuel Decams; Yuancheng Ji; Farshad F. Bolamiri; Ventsislav Yantchev; Ausrine Bartasyte

arXiv · 2610.24639

Shear SAW piezoelectricity of single-crystalline $\mathrm{LiNbO_3}$ films grown on $42^{\circ}$ YX-$\mathrm{LiTaO_3}$ substrates by DLI-CVD

Mikhail Mirushchenko·Roland Salut·Ludovic Gauthier-Manuel·Vincent Astié·Samuel Margueron·Jean-Manuel Decams·Yuancheng Ji·Farshad F. Bolamiri·Ventsislav Yantchev·Ausrine Bartasyte

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Abstract

Direct growth of single-crystalline $\mathrm{LiNbO_3}$ films with technologically relevant nonpolar orientations and a single ferroelectric domain state remains challenging. Here, we demonstrate the epitaxial growth of a 320-nm-thick, single-domain $42°$ YX-oriented $\mathrm{LiNbO_3}$ film on a congruent $42°$ YX-cut $\mathrm{LiTaO_3}$ substrate by direct liquid injection chemical vapor deposition. The deposition temperature was limited to $600°\mathrm{C}$ to preserve the ferroelectric domain state of the $\mathrm{LiTaO_3}$ substrate. X-ray diffraction confirmed that the $\mathrm{LiNbO_3}$ film inherited the substrate orientation and domain state and exhibited no detectable secondary phases. The LN rocking-curve full width at half maximum was $0.011°$, approaching the instrumental resolution and demonstrating its high crystalline quality. Single-port leaky surface acoustic wave (LSAW) resonators with a wavelength of $4\,μ\mathrm{m}$ were fabricated on the $\mathrm{LiNbO_3/LiTaO_3}$ heterostructure and on a bare $\mathrm{LiTaO_3}$ reference substrate. At approximately 1 GHz, the $\mathrm{LiNbO_3/LiTaO_3}$-based resonators exhibited an electromechanical coupling coefficient of about 13%, compared to 8.5% for the reference $\mathrm{LiTaO_3}$-based resonators. These results demonstrate that direct epitaxial growth can produce high-quality, strongly piezoelectric $\mathrm{LiNbO_3}$ films and provide a route toward thickness-controlled layered substrates for high-performance acoustic devices.

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Mikhail Mirushchenko, Roland Salut, Ludovic Gauthier-Manuel, Vincent Astié, Samuel Margueron, Jean-Manuel Decams, Yuancheng Ji, Farshad F. Bolamiri, Ventsislav Yantchev, Ausrine Bartasyte. 2026-10-17. Shear SAW piezoelectricity of single-crystalline $\mathrm{LiNbO_3}$ films grown on $42^{\circ}$ YX-$\mathrm{LiTaO_3}$ substrates by DLI-CVD. https://arxiv.org/abs/2610.24639

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