arXiv Science⌕ Search
Home/Archive/arXiv

arXiv · 2609.32473

VPEvolve: A Self-Evolving Virtual Process Engineer for Computational Lithography

Tianyi Li·Wenxuan Dong·Donger Luo·Nan Wang·Yanpeng Chen·Jiaqi Liu·Xinyun Zhang·Hao Geng
View original source ↗Read source document ↗Export metadata ↓

Abstract

Optical proximity correction (OPC) recipes grow as engineers add local rules to repair newly discovered lithography hotspots. Each correction can interact with existing rules, while lessons from commercial-tool trials remain scattered across code and logs. \system combines a Virtual Process Engineer (VPE) harness with a Skill Bank of measured engineering experience. The harness equips a frozen language model with process manuals, layout analysis, recipe editing, and commercial-tool evaluation. The actor proposes changes to the global parameters, local targeted rules, or diagnostic trials. After each evaluation, an LLM reflector and curator turn the measured response into evidence-linked judgments. The actor retrieves them before its next trial. Feasible improvements update the retained recipe; every measured trial informs the Skill Bank that guides the next edit. The model weights remain fixed. On a FreePDK45-derived benchmark with ten commercial-tool evaluations per case, \system reduces the mean per-case maximum edge placement error from 18.294 to 5.361 nm on Poly and from 22.052 to 15.692 nm on Metal1. Every final recipe satisfies the predefined quality constraints and improves the maximum error by at least 0.1 nm.

Explore related subjects

cs.AIcs.SE

Keep this discovery

Explore connections, maps & timelines

BibTeXRIS

Tianyi Li, Wenxuan Dong, Donger Luo, Nan Wang, Yanpeng Chen, Jiaqi Liu, Xinyun Zhang, Hao Geng. 2026-09-26. VPEvolve: A Self-Evolving Virtual Process Engineer for Computational Lithography. https://arxiv.org/abs/2609.32473

Cite the original work for its findings. Save a collection to share your selection of sources.

KEEP EXPLORING

Related papers

arXiv2026

FlexQuant: Elastic Quantization Framework for Locally Hosted LLM on Edge Devices

Deploying LLMs on edge devices presents serious technical challenges. Memory elasticity is crucial for edge devices with unified memory, where memory is shared and fluctuates dynamically. Existing solutions suffer from either poor transition granularity or high storage costs. We propose FlexQuant, a novel elasticity framework that generates an ensemble of quantized models, providing an elastic hosting solution with 31x more deployment options, 15x granularity improvement, and 10x storage reduction compared to SoTA methods. FlexQuant works with most quantization methods and creates a family of trade-off options under various storage limits through our pruning method. It brings great performance and flexibility to the edge deployment of LLMs.

cs.AI↗
arXiv2026

Rethinking Prospect Theory for LLMs: Revealing the Instability of Decision-Making under Epistemic Uncertainty

Real-world decision-making often involves uncertainty expressed in linguistic rather than numerical terms, and Prospect Theory (PT) provides a classic framework for modeling human behavior under such uncertainty. Although recent studies have developed frameworks to estimate PT parameters for Large Language Models (LLMs), few have examined whether PT itself adequately describes LLM decision-making behavior. To address these gaps, we develop a streamlined workflow grounded in a classic behavioral economics experimental paradigm. First, we estimate PT parameters and evaluate how well the resulting model captures LLM decision-making behavior. We then derive probability mappings for epistemic markers in the same context and inject them into prompts to examine the stability of PT parameters under linguistic uncertainty. Our findings suggest that PT does not consistently provide a reliable account of LLM decision-making across models, and that its application to LLMs is likely sensitive to epistemic uncertainty. The findings caution against the deployment of PT-based frameworks in real-world applications where epistemic ambiguity is prevalent, giving valuable insights in behaviour interpretation and future alignment direction for LLM decision-making.

cs.AI↗
arXiv2026

Enabling Regulatory Multi-Agent Collaboration: Architecture, Challenges, and Solutions

Large language models (LLMs)-empowered autonomous agents are transforming both digital and physical environments by enabling adaptive, multi-agent collaboration. While these agents offer significant opportunities across domains such as finance, healthcare, and smart manufacturing, their unpredictable behaviors and heterogeneous capabilities pose substantial governance and accountability challenges. In this paper, we propose a blockchain-enabled layered architecture for regulatory agent collaboration, comprising an agent layer, an off-chain computation layer, and an on-chain anchoring layer. Within this framework, we design three key modules: (i) an agent behavior tracing and arbitration module for automated accountability, (ii) a dynamic reputation evaluation module for trust assessment in collaborative scenarios, and (iii) a malicious behavior forecasting module for early detection of adversarial activities. Our approach establishes a systematic foundation for trustworthy, resilient, and scalable regulatory mechanisms in large-scale agent ecosystems. Finally, we discuss the future research directions for blockchain-enabled regulatory frameworks in multi-agent systems.

cs.AI↗