Toward Ku-Band Surface Acoustic Wave Delay Lines on AlScN-on-Diamond with Decoupled Phase and Group Velocities

Abstract

This work reports surface acoustic wave (SAW) acoustic delay lines (ADLs) on an aluminum scandium nitride (AlScN) on diamond platform operating in the X band and approaching the Ku band. The large acoustic-velocity contrast between the AlScN film and the diamond substrate produces a strongly dispersive Sezawa branch that decouples the phase velocity from the group velocity. Delay lines with a 1 $μ$m wavelength show a Sezawa passband at 9.55 GHz with a fractional bandwidth of 1.05%, a propagation loss of 0.094 dB per wavelength, a propagation-limited quality factor of 465, and a group velocity of 5979 m/s, while co-fabricated resonators give a phase velocity of 9560 m/s, a ratio of about 1.6. Scaling the wavelength to 0.5 $μ$m moves the passband to 16.5 GHz with a fractional bandwidth of 0.7%. The platform therefore reaches an operating frequency about 1.5 times higher than AlScN on sapphire at the same lithographic pitch while preserving group delay per unit length.