Two-Dimensional Materials toward CMOS-Compatible Scalable Quantum Hardware

Mara Lieberegts; Ye Wang

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arXiv · 2609.16172

Two-Dimensional Materials toward CMOS-Compatible Scalable Quantum Hardware

Mara Lieberegts·Ye Wang

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Abstract

Manufacturability is one of several constraints on developing solid-state quantum processors, along with qubit performance, control, connectivity, cryogenic operation, and fault tolerance. Chemical residues, structural disorder, and non-uniform interfaces introduced during fabrication can compromise qubit coherence. Two-dimensional (2D) materials, with their atomically thin crystals and van der Waals interfaces, offer routes to address some of these challenges. Their concurrent development as next-generation CMOS channel materials motivates an examination of whether relevant processes can be transferred to quantum chips. This Perspective evaluates the opportunities and limitations of 2D materials for CMOS-compatible quantum hardware.

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Mara Lieberegts, Ye Wang. 2026-09-14. Two-Dimensional Materials toward CMOS-Compatible Scalable Quantum Hardware. https://arxiv.org/abs/2609.16172

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