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arXiv · 2605.26468

Diffuse to Detect: Generative Diffusion Models for Unsupervised IC Anomaly Detection

Yuxuan Yin·Chen He·Todd Jacobs·Jialei He·Boxun Xu·Robert Jin·Peng Li
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Abstract

Latent defect screening is challenged by extremely low failure rates, high-dimensional test data, and absence of labeled anomalies. We propose the first unsupervised anomaly detection framework incorporating a Diffusion Transformer. Raw test measurements are first compressed by an autoencoder, then reshaped into a structured token sequence enriched with sinusoidal and per-device wafer-position embeddings. Anomaly scores are derived from the noise-prediction error over mid-range diffusion timesteps, enabling fast wafer-scale screening without any labeled defects or manual feature engineering. Our approach achieves state-of-the-art performance on industrial 16nm IC test data under extreme class imbalance, offering interpretable failure localization through latent-space reconstruction residuals.

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Yuxuan Yin, Chen He, Todd Jacobs, Jialei He, Boxun Xu, Robert Jin, Peng Li. 2026-05-26. Diffuse to Detect: Generative Diffusion Models for Unsupervised IC Anomaly Detection. https://arxiv.org/abs/2605.26468

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