Tracking visible pulsed laser annealing of Hf$_{0.5}$Zr$_{0.5}$O$_2$ heterostructures with in situ transmission electron microscopy

Abstract

Laser annealing offers a promising route to back end of the line fabrication of ferroelectric thin film transistors based on hafnium-zirconium oxide (HZO). Due to the wide band gap of this material, previous reports have studied the crystallization of HZO using ultraviolet or infrared light. In contrast, we monitor its crystallization in a Si$_3$N$_4$/TiN/Hf$_{0.5}$Zr$_{0.5}$O$_2$ thin film heterostructure upon irradiation with visible nanosecond laser pulses. This geometry mimics the structure of CMOS devices and harnesses the absorption of TiN in the visible regime to generate the heat necessary for the transformation. Through a series of local in situ measurements using a modified transmission electron microscope, we quantify the relationship between the HZO film thickness, critical laser energy density and the ferroelectric HZO phase fraction, finding a sharp threshold behavior in the laser pulse energy necessary to crystallize HZO. The optimal condition of irradiating an 8-nm HZO film with a single laser pulse with an energy density of 177 mJ/cm$^2$ is found to produce 86% of the ferroelectric orthorhombic phase. Heat transfer dynamics within the heterostructure during laser annealing are revealed by finite element simulations, where the partial melting of the silicon nitride substrate is found to play an important role limiting the temperature to 1900 {\deg}C. This finding as well as the observed laser pulse energy threshold behavior support a kinetic crystallization pathway involving the tetragonal phase. More generally, these findings show how laser-driven phase engineering can lead to scalable design and enhanced performance of ferroelectric materials in advanced electronic applications.