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arXiv · 2604.22086

Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes

Ekta Bhatia·Yingge Du·Krishna P Koirala·Chung Kow·Mingzhao Liu·Juan Macy·Tharanga R. Nanayakkara·Francisco Ponce·Satyavolu S. Papa Rao·Drew J. Rebar·Peter V. Sushko·Brent A VanDevender·Chongmin Wang·Marvin G. Warner·Zhihao Xiao
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Abstract

Surface oxides contribute to losses in superconducting transmon devices resulting in degraded performance. We explore the use of the damascene process to replace the sidewall native oxide of a device with a metal/substrate interface. We simulate sidewall oxidation by burying an oxide layer during fabrication. We observe a modest improvement between the two types of devices, which is suggestive of a reduction in the surface participation ratio.

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Ekta Bhatia, Yingge Du, Krishna P Koirala, Chung Kow, Mingzhao Liu, Juan Macy, Tharanga R. Nanayakkara, Francisco Ponce, Satyavolu S. Papa Rao, Drew J. Rebar, Peter V. Sushko, Brent A VanDevender, Chongmin Wang, Marvin G. Warner, Zhihao Xiao. 2026-04-23. Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes. https://arxiv.org/abs/2604.22086

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